»¯Ñ§»úеÅ׹⣨CMP£©ÊÇÒ»ÖÖÁ¢ÒìµÄ¼¼Êõ
£¬£¬£¬ÓÃÓڳĵ׺Ͷà²ãÆ÷¼þƽչ»¯
£¬£¬£¬ÒÔ»ñµÃÓÅÒìµÄƽÃæ¶È¡£¡£¡£¡£ÏÖÔÚ
£¬£¬£¬CMPÒѾ­³ÉΪÖƱ¸ºÍ¼Ó¹¤µç×Ó¼¶¾§Ô²µÄÒ»ÖÖÒªº¦ÒªÁ죺ͨÒÑÍù³ýÍâòÖÊÁÏÀ´Ê¹¾§Ô²µÄÐÎòƽչ
£¬£¬£¬ÕâÒ»Àú³ÌÊÇͨ¹ý»¯Ñ§·´Ó¦ºÍÓ¦Óá°ÎÂ˳¡±ÑÐÄ¥Á¦µÄ×éºÏÀ´ÊµÏֵġ£¡£¡£¡£

CMPÊÇÒ»ÖÖÌØÊâµÄÑÐÄ¥
£¬£¬£¬Ê¹ÓðüÀ¨Ñõ»¯ÂÁ£¨Al2O3£©µÈÄ¥ÁÏÔÚÁ½¸öÍâòһÆðÄ¥Ï÷¡£¡£¡£¡£»£»
£»úеÑÐÄ¥ºÍ»¯Ñ§»úеÅ×¹âµÄÖ÷ÒªÇø±ðÔÚÓÚÅ×¹âÒºÓ뾧ԲµÄ»¯Ñ§Ï໥×÷Óᣡ£¡£¡£Æä×î¼òÆÓµÄÐÎʽ¿ÉÒÔÐÎòÈçÏ£ºCMP½«»¯Ñ§»îÐÔÁ£×Ó»ò»¯Ñ§Ñõ»¯¼ÁÒýÈëµ½¼Ó¹¤ÖÐ
£¬£¬£¬ÕâЩÁ£×ÓÓ뾧Բ×î±í²ã±¬·¢·´Ó¦ÐγɿÉͨ¹ýÄ¥ÁÏÈÝÒ×È¥³ýµÄÈíÖÊÁÏ¡£¡£¡£¡£

ÏÖ´úCMPËùÃæÁÙµÄÌôÕ½°üÀ¨£º¸üÑÏ¿áµÄȱÏÝÒªÇó
£¬£¬£¬¶à±äµÄÍâòºÍÖÜΧ»¯Ñ§ÎïÖÊ
£¬£¬£¬Ä¥ÁÏÄÉÃ׿ÅÁ£µÄ³ß´ç¡¢ÐÎòºÍ¹¦Ð§ÐÔ
£¬£¬£¬ÐÂÐͳĵ×ÖÊÁÏ
£¬£¬£¬¶Ô°£¼¶ÔȳÆÐÔµÄÒªÇ󡣡£¡£¡£CMPµÄÕûÌåÓÅÒìÐÔÄÜÊÇ°ü¹Üµç×Ó¼¶¾§Ô²ºÍ×îÖÕ²úÆ·ÀֳɵÄ;¾¶¡£¡£¡£¡£

Ôڵ䷶µÄCMPÀú³ÌÖÐ
£¬£¬£¬¾§Ô²Í¨¹ýÍâòÕÅÁ¦»ò±³Ñ¹Àο¿ÔÚÔØÌåÉÏ
£¬£¬£¬È»ºóѹÔÚÌùÓÐÅ×¹âµæµÄתÅÌÉÏ¡£¡£¡£¡£Ä¥ÁÏ¡¢»¯Ñ§Öú¼ÁºÍÑõ»¯¼Á»ìÏý³ÉÅ×¹âÒºÊèÉ¢ÔÚÕâÁ½¸öÍâò֮¼äµÄ½çÃæÉÏ¡£¡£¡£¡£ÖÊÁÏÈ¥³ýÂÊÓÉתÅ̵ÄÏà¶ÔËÙÂʺÍѹÁ¦¡¢¾§Ô²ºÍÅ×¹âÒºÖ®¼äµÄ»¯Ñ§»îÐÔÒÔ¼°ÔÚÅ×¹âÒºÖÐÊÂÇéµÄÄ¥ÁϵÄÎïÀí»¯Ñ§ÐÔ×Ó¾öÒé¡£¡£¡£¡£

ÈôÊÇÉÏÊöÒòËØÖеÄÿһ¸ö¶¼»ñµÃÓÅ»¯
£¬£¬£¬CMP¾Í¿ÉÒÔ°ü¹ÜÔÚ¸ßЧȥ³ýµÄÌõ¼þÏ»ñµÃ¸ß¶Èƽչ»¯¡¢ÎÞȱÏݵÄÍâÑÓ¼¶³Äµ×¡£¡£¡£¡£

ÀýÈç
£¬£¬£¬BBÊÓѶϸÃÜÅ×Ä¥ÊÂÒµ²¿¿ª·¢ÁËһϵÁÐÑõ»¯ÂÁÅ×¹âÒº
£¬£¬£¬×¨ÃÅÓÃÓÚ̼»¯¹è£¨SiC£©³Äµ×Å׹⡣¡£¡£¡£½üÆÚ
£¬£¬£¬µ¥¾§Ì¼»¯¹èÔÚ΢µç×ÓºÍÓ¡Ë¢µç×ÓÖÆÔìÖÐÔ½À´Ô½Êܵ½ÖØÊÓ
£¬£¬£¬Ì¼»¯¹è¼«¸ßµÄЧÂʺÍÓÅÒìµÄÈÈÐÔÄÜÓÐÖúÓڸ߹¦ÂÊ΢µç·µÄÉè¼Æ¡£¡£¡£¡£È»¶ø
£¬£¬£¬ÖØ´óµÄ΢¹Û½á¹¹ºÍ¸ßÓ²¶ÈµÄÖÊÁÏÒѱ»Ö¤ÊµÄÑÒÔÓÃÓÚÍâÑÓ
£¬£¬£¬ÓÉÓÚ»ñµÃÒ»¸öºÏÊÊÍâÑÓ¼¶Íâò³äÂúÁËÌôÕ½¡£¡£¡£¡£

BBÊÓѶµÄClasSiCTM ϵÁÐÅ×¹âÒº½ÓÄÉÁËÐÂÐÍÄÉÃ×Ä¥ÁÏ£¨60nm×óÓÒ£©ºÍ¸ßЧÑõ»¯¼Á
£¬£¬£¬´Ó¶øÄܹ»Ìá¸ßÖÊÁÏÈ¥³ýÂÊ
£¬£¬£¬²¢¸ÄÉÆSiC³Äµ×µÄƽչ»¯¡£¡£¡£¡£Ö»¹Ü¸ÃϵÁÐÅ×¹âÒºµÄÖÊÁÏÈ¥³ýÂʺܸߣ¨µ¥Æ¬»ú>10¦Ì/hr£©
£¬£¬£¬µ«Æä»®É˺ÍÆäËüȱÏÝÂÊ°üÀ¨ÑÇÍâòËðÉ˺ÜÊǵ͡£¡£¡£¡£

ÔÚµç×Ó¼¶¾§Ô²µÄCMPÖÐ
£¬£¬£¬±ØÐèҪ˼Á¿¾§Ô²µÄÆæÒì»úеÐÔÄÜ
£¬£¬£¬´Ó¶øÕë¶ÔÐÔµÄʹÓÃÅ×¹âÒºÀ´Ìá¸ß×îÖÕ²úÆ·µÄÖÊÁ¿
£¬£¬£¬ÕâÊǺÜÊÇÖ÷ÒªµÄ¡£¡£¡£¡£

BBÊÓѶϸÃÜÅ×Ä¥ºÍCMP

ÔÚµç×Ó¼¶¾§Ô²ºÍ¹¦Ð§ÐÔÍâòCMPÁìÓò
£¬£¬£¬BBÊÓѶϸÃÜÅ×Ä¥ÊÂÒµ²¿ÊÇרҵ»ú¹¹Ö®Ò»¡£¡£¡£¡£ÀýÈ磺ÎÒÃÇΪSiC³Äµ×ƽչ»¯ÌṩClasSiCTMϵÁвúÆ·
£¬£¬£¬²¢Îªµª»¯ÂÁ£¨AlN£©¡¢µª»¯ïØ£¨GaN£©¡¢À¶±¦Ê¯£¨Al2O3£©¡¢¹è£¨Si£©ºÍµª»¯¹è£¨SiNx£©µÈÖÊÁϵÄCMP¿ª·¢ÁËÆæÒìµÄ½â¾ö¼Æ»®¡£¡£¡£¡£